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Decompression and atmospheric pressure process vaporizer VU-206 series

Decompression and atmospheric pressure process vaporizer VU-206

This is a vaporizer that efficiently supplies various liquids with precise flow control in combination with the liquid mass flow meter LM-3000L series. 【Features】 ○ In combination with the liquid mass flow meter LM-3000L series, it allows for precise flow control of various liquid materials (TEOS, TEB, TEPO, etc.) while enabling high-efficiency vaporization. ○ Equipped with a piezo valve. ○ Compatible with processes from atmospheric pressure to reduced pressure. ○ Capable of heating up to 160°C. ○ Compact body size. ○ Compliant with RoHS. *For other functions and details, please download the catalog.